Force State® RF Power Supply Products

Industry and Research

 

Force State® RF Power Supply Products are built to drive the following application.

 

PVD                                                                                     

HDP-CVD                                                                            

Capacitively coupled plasma (CCP)                                    

Inductively Coupled Plasma ( ICP)                                      

Reactive Ion Etching (RIE)                                                   

PECVD (Plasma Enhanced Chemical Vapor Deposition)    

Plasma Clean System                                                          

Atmospheric Plasma                                                             

Biomedical-Biochip                                                              

Nano-materials                                                                     

 

Aurora Product Series                                                

 

Aurora Integrated Power Supply  (IPS)                                

Aurora Integrated Plasma Equipment (IPE)                          

Aurora Oxygen/Selected Gas Plasma System                       

Aurora Atmospheric Plasma System                                                   

 

Product Features: 

1. The Integrated Plasma Power Supply (IPS) is one box combo/detachable design for RF Power Generator and Matching Box. RF Plasma could be applied to wider selection of materials for better efficiency versus DC Plasma.

2. The impedance could be adjusted by the IPS with automatic, semi-automatic, and fine tune modes.  The VSWR is less than 1.2.

3. The output power/gain could be adjusted continuously.  

4. The optional gas module could provide Main Gas (Helium or Argon) and Reactive Gas (Oxygen, Nitrogen and else).

5. The Oxygen/Selected Gas Plasma system and Atmospheric Plasma system solution package is provided.

 

Force State® 高頻電源產品用來驅動以下應用

物理氣相沉積

高密度化學氣相沉積

電容耦合電漿

感應耦合電漿系統 

電漿蝕刻

電漿輔助化學沉積

電漿清潔系統

常壓大氣電漿

生物醫學-生物晶片

奈米材料

 

Aurora 產品系列

整合式高頻電源供應器

整合式高頻電漿系統

氧氣/選用氣體電漿系統

常壓電漿系統

 

產品的特色 

1. 整合式電漿電源供應器, 結合 RF Power Generator 與 Matching Box為可拆一體式箱體. RF 高頻電漿較直流電漿能處理更多種物體及有效率.

2. 阻抗匹配 Impedance Matching 可以全自動 Automatic, 半自動 Semi-auto, 精密Fine Tune 即時調整. 反射功率 VSWR < 1.2. 

3. 輸出功率可以無段自由調整.   

4. 提供選配氣體模組可以選用主要氣體 Main Gas (氦氣或氬氣) and 反應氣體 Reactive Gas (氧氣, 氮氣, 及其他).

5. 提供氧氣/選用氣體電漿系統及常壓電漿系統整體解決方案. 

 

 

Price in USD

© 2014 by PFS Co., Ltd.   ALL RIGHTS RESERVED

P.O.Box 177-68 Taipei Renhang,

Taipei City 10099, Taiwan

寶林泰科技有限公司

通訊地址: 10099 台北仁杭郵局第 177-68 號信箱

辦公室:     106 台北市東豐街 9號

Phone: +886-(0)2-2393-9032

Email: pfscotw@gmail.com

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