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AuroraTM Oxygen/Selected Gas Plasma System OP-300
RF Generator for wider treated materials selection and superior efficiency versus DC Plasma.
Inductively Coupled Plasma
Reactive Gas: O2, N2, H2….
Real Time Impedance Auto-matching
PID heater: For atmospheric plasma (optional)
Multiple Memory Settings

Treated Materials:
BIO-MEMS Materials: Cellulose, Cuprophane, PC, PDMS, PE, PET, PGA, PLA, PHEMA, PMMA, PP, PTFE, PVC, Teflon, UHMPE,
Other polymeric materials: Plastics, Resins, Polymers, Parylene,
Metal: Ti-Alloy, Ti-Ni, Co-Cr

Aurora Oxygen /Selected Gas Plasma System OP-300

  • Aurora Oxygen/Selected Gas Plasma OP-300

    Model V: Integrated One Set Design(space savings) Front Opening Chamber
     Dimension (WxDxH): 465 X 600 X 690 mm
     Weight: about 80 kg (including RF Power Supply)

    Model H: Individual Chamber (for clean room and negative pressure environments)
    - Model H-FO: Front Door Opening Chamber
    - Model H-TO: Top Door Opening Chamber
     Dimension (WxDxH): 535 X 435 X 420 mm
     Weight: about 43 kg

    System Specification
    1. RF Power Supply
     Input: AC90V-240V,50-60HZ,6A
     RF Output Power: MAX 200W (Standard) ; MAX 100 W (Mini)
     Conforms to FCC and CE.
     Frequency:13.56MHZ +/- 50PPM
     Power Range Adjustment: continuous 1 W to 200 W
     Output Impedance:3ohm to 50ohm
     PID Temperature Control: Source Constant heating
     Real Time Auto-matching (up to 1,000 W)(1.5 KW Optional)
     Air Cooling
     Main Gas Flow Range: 0-30 SLM
     Reactive Gas Flow Range: 0-5 SLM
     Connector: 6 mm or 1/4 inch Speed connector
     Dimension (WxDxH): 482 X 560 X 202 mm
     Weight: about 36 kg.

    2. Vacuum Chamber
     Chamber Size: Diameter = 250 mm, Depth =220 mm
     Lower Pressure Limit: 20 mTorr

    3.Vacuum Gauge Controller plus Pirani Vacuum Gauge Sensor
    - Digital Display (1 X 10 exp-3 to 9.9 X 10 exp2 Torr)
    - Bright Green LED Display
    - Full Range 90 to 260 V AC Power Input 90-260 V

     Accessories
    Bellows, Center rings, and clamps
    Rotary Pump: 150 Liter/min or equivalent