- Flow Rang 10 ccm to 30 SLM
- Accuracy: +-1% Full Scale
- Repeatability: 0.25% of rate
- Leak Integrity: 10 exp-9 ATM cc/sec
Brooks 5850E D-Type
$1,300.00 一般價格
$1,200.00銷售價格
- Brooks 5850 E D-Type
Type: Elastomer Seal Mass Flow Controller Mass Flow Meter
Full Scale Capacity3 sccm - 30 slpm
Max Pressure 100 bar/1500 psig
Max Temp65 C/150 F
Accuracy 1% FS
Input/Output0-5 Vdc