Force State RF Generator is Capable of Driving various ICP, CCP, Sputtering, PECVD Vacuum Chamber, and Atmospheric Plasma.
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Checking for and Resolving Errors and Alarms
The AURORATM generator responds to many error and warning conditions. Errors and alarm display on the front panel LED indicators. Error conditions always turn output off. If multiple error conditions exist, the unit displays all errors. When operating in front panel control mode, you need to restart the AURORATM generator after the condition that caused the error has been resolved.
Alarm conditions do not shut output power off, and the alarm status is cleared when the condition that caused the alarm condition is gone. The front panel can display multi-alarm message at a time. Overload alarm indicate that an operating limit has been exceeded, and the unit has reduced output power to remain within the allowable range.
AURORATM generator runs self-test after turning on the main power. The following table describe errors occurs during self-test procedure.
