Direct Shop

Troubleshooting Guide

 

The following questions may help solve troubleshooting problems.

 

GENERAL TROUBLESHOOTING

Use the following procedure to troubleshoot general problems.

1. Did you install the AURORATM generator according to the installation instructions in this manual?

 If yes, go to the next step.

 If no, reinstall the AURORATM generator as described in “Installing the AURORATM Generator”.

2. Is the mains voltage within specifications?

 If yes, go to the next step.

 If unsure or no, see “Incorrect Input Voltage”.

3. Is the front panel display (LCD) lit?

 If yes, go to the next step.

 If no, see “Front Panel Display (LCD)”.

4. Check the front panel display for any fault or alarm messages. 

 If there is no alarm or error message on the display, go to the next step. 

 If there is an error or alarm message on the display, see “Checking for and Resolving Errors and Alarms”.

5. For any other general problems, contact Customer Support.

 

MISMATCHING TROUBLESHOOTING

Use the following procedure to troubleshoot potential problems with the matching network.

 

1. Did you verify that the impedance range of the matching network is appropriate to the load?

 If yes, go to the next step.

 If unsure or no, see “Improper Impedance Range”.

3. Did you properly establish the HF connections between the generator and

the load?

 If yes, go to the next step.

 If unsure or no, see “Improper RF Connection or Cabling”.

4. Did you establish proper common grounding for the generator, and load?

 If yes, go to the next step.

 If unsure or no, see “Improper Grounding”.

5. If these steps have not resolved the problem, contact Customer Support.

Improper Impedance Range

A variety of problems can occur if the specifications of the connected load do not correspond to basic application parameters such as impedance, current, voltage, 

 

these problems can include:’

• Difficulty igniting plasma

• Difficulty achieving expected minimum reflected power with manual or automatic tuning by the matching network

• Arcing inside the matching network

For any additional information or questions, contact Customer Support.

 

Improper RF Connection or Cabling

Proper operation requires low impedance RF connections between the generator, and load. In most situations, coaxial cable of an appropriate diameter is sufficient for the RF connections. Additionally, make the following checks

 

• Verify that there contacts are not loose or corroded.

• If you are working with an installations that requires low impedances and higher currents, try metal strap or stripline connections.

• Consider the surface area and surface structure of conducting elements (cables, vacuum feedthroughs, and electrodes) to ensure that all elements are appropriate for the low penetration depth of RF currents.

• Minimize the cable length between the match and load to minimize power losses. With some applications, you may also need to optimize the cable length between the generator and load to achieve a stable plasma that doesn’t flicker or flash

. 

For questions about proper cable selection, contact Customer Support.

 

Improper Grounding

Proper operation requires that you use a central, common ground for the generator, and load. Ensure that you have appropriate grounding for all elements of the system. For more information, see “Grounding”

 

Improper Tuning Adjustment

FORCE STATE® PFS Co., Ltd. ships AURORATM unit with standard tuning settings, which are appropriate for most applications. In rare cases, the tuning parameters may need to be adjusted for special applications. For information on adjusting these tuning parameters, contact Customer Support.